6 results
Manipulating the Hydrogen-Bonding Configuration in ETP-CVD a-Si:H
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- Journal:
- MRS Online Proceedings Library Archive / Volume 989 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0989-A22-04
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- 2007
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In Situ Probing and Atomistic Simulation of a-Si:H Plasma Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 664 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, A1.1
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- 2001
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Hydrogen Incorporation During Deposition of a-Si:H From an Intense Source of SiH3
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- Journal:
- MRS Online Proceedings Library Archive / Volume 467 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 621
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- 1997
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On the Effect of Substrate Temperature on a-Si:H Deposition Using an Expanding Thermal Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 420 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 341
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- 1996
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Hard Amorphous Hydrogenated Carbon Films Deposited from an Expanding Thermal Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 436 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 287
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- 1996
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An Expanding Thermal Plasma for Deposition of a-Si:H
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- Journal:
- MRS Online Proceedings Library Archive / Volume 377 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 33
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- 1995
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